JPH01106565U - - Google Patents
Info
- Publication number
- JPH01106565U JPH01106565U JP49288U JP49288U JPH01106565U JP H01106565 U JPH01106565 U JP H01106565U JP 49288 U JP49288 U JP 49288U JP 49288 U JP49288 U JP 49288U JP H01106565 U JPH01106565 U JP H01106565U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- substrate
- ejected
- gas
- plasma cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 238000007664 blowing Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49288U JPH01106565U (en]) | 1988-01-06 | 1988-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49288U JPH01106565U (en]) | 1988-01-06 | 1988-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01106565U true JPH01106565U (en]) | 1989-07-18 |
Family
ID=31199567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49288U Pending JPH01106565U (en]) | 1988-01-06 | 1988-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01106565U (en]) |
-
1988
- 1988-01-06 JP JP49288U patent/JPH01106565U/ja active Pending